The JSM 7100f-TTL JEOL SEM has an accelerating voltage in the range of 1-30 keV with the possibility of HV<1 keV using Gentle Beam technology. It is equipped with an EDS apparatus (X-MAX 80, Oxford instruments) and a Cathodoluminescence spectroscopy apparatus (MonoCL4, GATAN). It is also equipped with a heating stage for in-situ heating (range: RT-700 °C) and in-situ gas-dosing.
The microscope can be used for imaging conductive and dry surfaces with a resolution of a few nm. Besides surface morphology (secondary electrons) and phase-sensitive imaging (backscattered electrons), analysis can be extended to composition (EDS spectroscopy or maps) and optical emission (cathodoluminescence spectroscopy or mapping). Cathodoluminescence spectroscopy can be used to characterize some electronic and structural properties of the sample, such as the optical band gap or the presence of defects in the material. It is possible to heat the sample (and dose gas) in situ (i.e. during SEM analysis).
The laboratory also has instruments for sample preparation including a diamond wire saw (Well), a precision etching and coating system (PECS, GATAN), a precision ion polishing system (PIPS, GATAN), an ultrasonic disc cutter (GATAN), a dimple grinder and disc grinder (GATAN), a cross-section polisher (JEOL), a rotary polisher (STRUERS) and other auxiliary equipment (heating plates, vacuum box, ovens, water deionizer, stereomicroscope, etc.).
In charge of the instrument: Assoc. Prof. Mattia Fanetti. Technical staff in charge: Dr. Blaž Belec.
Availability
Location
Materials Research Laboratory, University of Nova Gorica
Vipaska 11c, 5270 Ajdovščina, Slovenia
Access
This instrument is available 6 hours per week for the activities of the ALL-MICRO network.
Output examples
Top - Cross-section of an integrated circuit obtained by argon ion polishing and observed by SEM. Bottom - A detail of the cross-section of the integrated circuit showing the concentration maps of some elements (W, Ni and Cu) obtained by EDS.
