Zeiss Leo 1540XB microscope is a Cross Beam SEM instrument with a FEG emission gun and Zeiss electromagnetic optics that enable reaching a resolution down to 2 nm in SEM mode and 150 nm in FIB mode.
The FIB emission gun is based on a Ga source, allowing the milling of the sample for crosssection inspection. The system is integrated with an EDS detector. In addition, a cryostage allows for inspecting frozen samples, a useful technique for samples containing water, such as biological samples, or for samples sensitive to heat damage. A load-lock is present for the cryo-sampling, allowing in situ sputter coating of the sample, without breaking the cooling during the entire process of freezing and imaging. The instrument is designed for material analysis, from morphological to elemental inspection. The cryo-stage opens the possibility for biological samples, or samples with high water content, without invasive drying procedures. Cells, foods, biological species, and gels are some of the samples that can be easily imaged with this instrument. The presence of the FIB column allows sample milling for cross-section imaging to investigate the morphology beneath the sample surface.
Responsible technical personnel: Martina Conti (Tecnologo).
Availability
Location
CNR Nano-Fabrication Facility
Building MM Area Science Park Strada Statale 14 km 163.5 34149 Basovizza Trieste
Access
The instrument is available for network activities for 25% of the machine's time. Sample preparation and storage are also possible in the facility, with periodic access.
Output examples
Characterisation of biological tissues— a) lung, b) liver and c) kidney— via Cryo-SEM.
